Product Introduction
Vacuum Plasma Cleaner is a multi-purpose mechanical system that is widely used for activation, deplating, modification, etching, adhesion enhancement and cleaning.The equipment has the characteristics of environmental protection and no pollution, energy saving and cost saving, good cleaning effect and so on.
Specification
| Item NO. | TS-PL60MA |
| Power Frequency | 40KHz/13.56MHz （Optional） |
| Volume | 60L |
| Power | 0-500W（Adjustable） |
| Cavity size(mm) | (L*W*H)400*450*400 mm |
| Layer | 11 |
| Overall size | (L*W*H)1000*1030*1630 mm |
| Vacuum pump | Oil pum/dry pump + Roots combination （Optional） |
| Vacuum degree | 5-100pa（Adjustable） |
| Material of Cavity | 316 stainless steel/imported aluminum alloy（Optional） |
| Gas flow control | 0-500SCCM(MFC±2%) |
| Gas channel | Two way(addability)：Ar/N2/H2/CF4/02 |
| Plasma generator | 40KHz/13.56MHz（Optional） |
| Tempture of capacity | ＜30℃ |
| Control mode | PLC+Touch screen |
| Software of system control | Independent |
| Electrode ceramic | Imported high frequency ceramics |
Function
Etching: It is very useful for the removal of photoresist polyimide residues and coatings based on silicides.
Adhesion enhancement: Adding chemical groups with strong activation ability to the matrix to improve the adhesion of the adhesive.
Cleaning: Removal of optical material contamination and removal of organic residues, oxidation and metal salts on the material contamination.
Activation: It can cause the surface of the substrate to form the required chemical polar bonds;
Deplating: Remove metal and other materials from the treated substrate to produce various products.
Product Application
